JPH0371045B2 - - Google Patents
Info
- Publication number
- JPH0371045B2 JPH0371045B2 JP23020085A JP23020085A JPH0371045B2 JP H0371045 B2 JPH0371045 B2 JP H0371045B2 JP 23020085 A JP23020085 A JP 23020085A JP 23020085 A JP23020085 A JP 23020085A JP H0371045 B2 JPH0371045 B2 JP H0371045B2
- Authority
- JP
- Japan
- Prior art keywords
- tubular body
- laser beam
- prism
- slit
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23020085A JPS6290506A (ja) | 1985-10-16 | 1985-10-16 | 薄板製管状体のスリツト幅検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23020085A JPS6290506A (ja) | 1985-10-16 | 1985-10-16 | 薄板製管状体のスリツト幅検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6290506A JPS6290506A (ja) | 1987-04-25 |
JPH0371045B2 true JPH0371045B2 (en]) | 1991-11-11 |
Family
ID=16904147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23020085A Granted JPS6290506A (ja) | 1985-10-16 | 1985-10-16 | 薄板製管状体のスリツト幅検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6290506A (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0750476A (ja) * | 1993-08-05 | 1995-02-21 | Nec Corp | 多層印刷配線板 |
-
1985
- 1985-10-16 JP JP23020085A patent/JPS6290506A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6290506A (ja) | 1987-04-25 |
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